The Uppsala team have been also in a position to undertake deposition of copper metallic by ALD working with copper(I) chloride.23 In such cases, the copper steel was deposited on tantalum metal foils, working with an evaporation temperature of 350°C as well as a deposition temperature selection of 360°C– 410°C. https://troyividq.laowaiblog.com/21780620/little-known-facts-about-ald-research